Negative index fishnet with nanopillars formed by direct nano-imprint lithography

In this paper we demonstrate the ability to fabricate fishnets by nanoimprinting directly into a pre-deposited three layer metal–dielectric–metal stack, enabling us to pattern large areas in two minutes. We have designed and fabricated two different fishnet structures of varying dimensions using this method and measured their resonant wavelengths in the near-infrared at 1.45 μm and 1.88 μm. An important by-product of directly imprinting into the metal–dielectric stack, without separation from the substrate, is the formation of rectangular nanopillars that sit within the rectangular apertures between the fishnet slabs. Simulations complement our measurements and suggest a negative refractive index real part with a magnitude of 1.6. Further simulations suggest that if the fishnet were to be detached from the supporting substrate a refractive index real part of 5 and FOM of 2.74 could be obtained.